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PVD Material List

Silicon

Silicon

OEM qualified supplier with global support

Silicon is the second most abundant element in nature, accounting for about 25.7% of the earth's crust. It can be found in Group IVB of the Periodic Table. Williams produces silicon from crystal growing techniques. The primary sputtering techniques for silicon are, RF Sputtering and DC Magnetron.

Benefits

  • Optimal Dopant Level Stocking Programs
  • Single Crystal Material Global Support
  • Low Cost Material OEM Qualified

Backing Plates & Bonding

Williams provides Molybdenum and alternative backing plate material for all major metallizing equipment. Our state-of-the-art bonding centers are located globally, offering standard metallic target bonding and high temperature solder bonding for greater disc metallizing throughput. Void free solder bonding verified by ultrasonic inspection.

Material Properties

Chemical Properties
Atomic Symbol: Si
Density: 2.33 g/cm3
Atomic Number: 14
Atomic Weight: 28.086
Crystal Structure: FCC

Electrical/Physical Properties
Electrical Resistively: 0.005-0.020 ohm-cm
Thermal Conductivity: 149 W m-1 K-1
Coefficient of Thermal Expansion: 14
Atomic Weight: 2.33 PPM/K
Hardness (Knoop): 1150 Kg/mm2

Hazardous Material Identification Guide

Health

Flammability

Reactivity

PPE

2

2

1

J


Vapor Pressure

10 -3 Torr

1 Torr

760 Torr

1477 C

2052 C

2357 C

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