Electrically conductive compound for high-vacuum applications
Product Data
Thermotech TE™ is a Silver-filled, electrically conductive high-vacuum
compound specifically manufactured by Pure Tech for the sputtering
target industry. Thermotech TE combines the excellent thermal
and electrical conductive properties of pure Silver with a low
vapor pressure sealant, enabling it to withstand high vacuum
operating ranges. Thermotech TE contains no Silicone, and is
non-hardening. Furthermore, Thermotech TE absorbs grease and
chemical impurities on metal surfaces, and cleans up easily
with solvents such as methanol or acetone, leaving surfaces
virtually contamination-free after use.
Thermotech TE is applied along the contact surfaces of the
sputtering target and cooling plate in systems that are indirectly
water-cooled. Because it is a viscous sealant, Thermotech TE
fills small scratches and surface imperfections better than
Indium foil, dramatically increasing target cooling. Since it
is electrically conductive, Thermotech TE will not hinder DC
sputtering operation.
(Note: do not apply Thermotech TE directly to ceramic or porous
metallic targets. Such targets should be bonded to a backing
plate before installing.)
Properties
| Operating temperature range |
10°C - 160°C |
| Vapor pressure @ 20°C |
2 x 10-9 Torr |
| Density |
1.97 g/cc |
| Color |
Gray |
Availability
Pure Tech's Thermotech TE is available in 50g kits. Each kit
contains enough compound for a 5" x 15" rectangular
or 10" diameter round cathode sealing area. Each kit includes
utensils for applying and spreading the compound. Please contact
your Pure Tech Sales Engineer for availability of larger kits.
How to apply
Mix the compound well before beginning. Apply a small amount
of Thermotech TE to the side of the sputtering target, which
will contact the cooling plate surface. Using the enclosed scraper,
evenly spread the compound so that the contact surface is completely
covered. DO NOT APPLY TOO MUCH compound: a layer approximately
.015" thick is sufficient for most applications. Using
an appropriate solvent, clean away any excess compound. Install
the target, making sure there is firm contact between the target
and the cooling plate. (NOTE: in some systems it may be easier,
or necessary, to apply the compound to the cooling plate surface
instead of the target.) After use, Thermotech TE may be scraped
away and any residual compound wiped clean with appropriate
solvent.
CAUTION: Refer to MSDS before opening or handling
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